Computer readable mask shrink control processor
US7539969B2 · kind B2 · utility
3Cited by
26References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 10, 2005 |
| Grant date | May 26, 2009 |
| Priority date | — |
| Expiry date | Apr 6, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F1/36
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus comprising computer readable media is provided. The computer readable media comprises computer readable code for receiving a feature layout and computer readable code for applying shrink correction on the feature layout. The computer readable code for applying the shrink correction comprises providing corner cutouts, adjusting line width and length, shape modifications, etc. for forming features in a patterned layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.