Patent · US Active

Spatial and spectral wavefront analysis and measurement

US7542144B2 · kind B2 · utility

2Cited by

20References

2Claims

0Family size

Assignee

ICOS Vision Systems NV · BE

Inventors

Yoel Arieli · Jerusalem, IL
Shay Wolfling · Kiryat Ono, IL
Eval Shekel · Jerusalem, IL

Key dates

Filing date	Nov 30, 2007
Grant date	Jun 2, 2009
Priority date	—
Expiry date	Nov 30, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG11B20/10009
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method and apparatus for wavefront analysis including obtaining a plurality of differently phase changed transformed wavefronts corresponding to a wavefront being analyzed which has an amplitude and a phase, obtaining a plurality of intensity maps of the plurality of phase changed transformed wavefronts and employing the plurality of intensity maps to obtain an output indicating the amplitude and phase of the wavefront being analyzed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.