Shay Wolfling
11Patents
5h-index
17Co-inventors
63Inventor score
Filing activity: Feb 20, 2001 → Dec 28, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7609388B2 | Spatial wavefront analysis and 3D measurement | Physics | 17 | Expired |
| US6707608B1 | Diffractive optical element and a method for producing same | Physics | 14 | Expired |
| US6819435B2 | Spatial and spectral wavefront analysis and measurement | Physics | 8 | Expired |
| US7327470B2 | Spatial and spectral wavefront analysis and measurement | Physics | 6 | Expired |
| US10209206B2 | Method and system for determining strain distribution in a sample | Physics | 5 | Active |
| US7542144B2 | Spatial and spectral wavefront analysis and measurement | Physics | 2 | Active |
| US10054423B2 | Optical method and system for critical dimensions and thickness characterization | Physics | 1 | Active |
| US10876959B2 | Method and system for optical characterization of patterned samples | Physics | 1 | Active |
| US10311198B2 | Overlay design optimization | Electricity | 0 | Active |
| US11885737B2 | Method and system for optical characterization of patterned samples | Physics | 0 | Active |
| US8319975B2 | Methods and apparatus for wavefront manipulations and improved 3-D measurements | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.