Shell flow sensor
US7549206B2 · kind B2 · utility
5Cited by
7References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2007 |
| Grant date | Jun 23, 2009 |
| Priority date | — |
| Expiry date | Oct 11, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A flow sensor system and a method for fabricating the same. A substrate is provided, comprising a detector wafer upon which a flow sensor is formed. One or more shells can then be configured upon the substrate whose walls form a flow channel. The flow channel is fabricated directly upon the substrate in a manner that allows the flow channel to couple heat transfer directly to the flow sensor in order to eliminate the need for two or more different types of sacrificial layers during the fabrication of the flow sensor upon the substrate and in which the shell(s) is coupled with fluidic measurement to provide for the flow sensor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.