Patent · US Active

Device for adjusting the illumination dose on a photosensitive layer

US7551263B2 · kind B2 · utility

3Cited by

11References

3Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Toralf Gruner · Hennef (Sieg), DE
Markus Deguenther · Aalen, DE

Key dates

Filing date	Apr 13, 2006
Grant date	Jun 23, 2009
Priority date	—
Expiry date	Feb 13, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70558
WIPO fieldOptics
WIPO sectorInstruments

Abstract

A device for adjusting the illumination dose on a photosensitive layer in a microlithographic projection exposure apparatus has a plurality of stop elements which are, in a direction perpendicularly to a scanning direction of the apparatus, arranged next to one another. Each stop element has an outer surface that absorbs substantially all projection light impinging thereon, and a substantially rectangular circumference. Each stop element furthermore has at least one recess in its circumference or at least one opening through which projection light is allowed to pass. A drive unit individually displaces the stop elements along the scanning direction into a light field.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.