Cantilever free-decay measurement system with coherent averaging
US7555940B2 · kind B2 · utility
6Cited by
8References
22Claims
0Family size
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Key dates
| Filing date | Jul 25, 2006 |
| Grant date | Jul 7, 2009 |
| Priority date | — |
| Expiry date | Jul 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q30/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method for measuring sample material properties by coherently averaging cantilever free-decay signals in a scanning probe microscope is described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.