Patent · US Expired

Methods of forming pluralities of capacitors

US7557015B2 · kind B2 · utility

56Cited by
85References
57Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 2005
Grant dateJul 7, 2009
Priority date
Expiry dateAug 27, 2025

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T29/43

Abstract

The invention includes methods of forming pluralities of capacitors. In one implementation, a method of forming a plurality of capacitors includes providing a plurality of capacitor electrodes within a capacitor array area over a substrate. The capacitor electrodes comprise outer lateral sidewalls. The plurality of capacitor electrodes is supported at least in part with a retaining structure which engages the outer lateral sidewalls. The retaining structure is formed at least in part by etching a layer of material which is not masked anywhere within the capacitor array area to form said retaining structure. The plurality of capacitor electrodes is incorporated into a plurality of capacitors. Other aspects and implementations are contemplated.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.