Scanning electron microscope
US7557346B2 · kind B2 · utility
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3References
6Claims
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Key dates
| Filing date | Mar 13, 2007 |
| Grant date | Jul 7, 2009 |
| Priority date | — |
| Expiry date | Jan 9, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2608
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A scanning electron microscope capable of securing a high ion detection efficiency in spite of a short working distance and the adaptability for high resolution is disclosed. An ion detector for detecting ions is arranged nearer to an electron source than a first pressure limiting aperture for maintaining the specimen chamber in a predetermined vacuum. This configuration makes it possible to achieve the high resolution of the semi-in-lens objective lens on one hand and to detect the ions generated by the collision between the secondary electrons and the gas molecules on the other hand.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.