Method and apparatus for dynamic adjustment of a sensor sampling rate
US7558687B1 · kind B1 · utility
24Cited by
2References
24Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 2, 2004 |
| Grant date | Jul 7, 2009 |
| Priority date | — |
| Expiry date | Apr 20, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B21/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The present invention provides a method and apparatus for dynamic adjustment of a sensor sampling rate. The method includes providing a data collection plan indicative of at least one first sampling rate for at least one sensor associated with at least one processing tool, receiving tool trace data from the at least one sensor via a network, and modifying, based on the tool trace data and a bandwidth associated with the network, the data collection plan to indicate at least one second sampling rate different from a corresponding at least one first sampling rate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.