Workpiece handling scan arm for ion implantation system
US7560705B2 · kind B2 · utility
7Cited by
2References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 17, 2007 |
| Grant date | Jul 14, 2009 |
| Priority date | — |
| Expiry date | Dec 15, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68764
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An ion implantation apparatus, system, and method are provided for connecting and disconnecting a workpiece holder from a scan arm. A twist head is provided, wherein an electrostatic chuck is operable to be mounted, wherein one or more rotating and non-rotating members associated with one or more of the twist head and electrostatic chuck have one or more dynamic electrical and fluid rotary connections associated therewith. The electrostatic chuck is further operable to be removed from the twist head without disconnecting the one or more dynamic fluid seals.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.