Michel Pharand
14Patents
5h-index
38Co-inventors
66Inventor score
Filing activity: Jun 19, 1998 → Sep 22, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5959305A | Method and apparatus for monitoring charge neutralization operation | Electricity | 15 | Expired |
| US7070661B2 | Uniform gas cushion wafer support | Electricity | 9 | Expired |
| US7026581B2 | Apparatus for positioning an elevator tube | Electricity | 8 | Expired |
| US7560705B2 | Workpiece handling scan arm for ion implantation system | Electricity | 7 | Active |
| US8376130B2 | Direct drive modular belt conveyor, cartridge, and quick connect-disconnect constant velocity drive shaft, for high speed FOUP transport | Performing Operations; Transporting | 6 | Active |
| US7151658B2 | High-performance electrostatic clamp comprising a resistive layer, micro-grooves, and dielectric layer | Electricity | 5 | Expired |
| US9625368B2 | Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structure | Physics | 3 | Active |
| US6727509B2 | Wafer pedestal tilt mechanism | Electricity | 2 | Expired |
| US7828504B2 | Combination load lock for handling workpieces | Electricity | 2 | Active |
| US9778579B2 | System and method for controlling a temperature of a reaction assembly | Performing Operations; Transporting | 2 | Active |
| US7100759B2 | Magnetic support structure for an elevator tube of a vertical rapid thermal processing unit | Electricity | 0 | Expired |
| US10107654B2 | Rotary probe head | Physics | 0 | Active |
| US11955308B1 | Water cooled, air bearing based rotating anode x-ray illumination source | Electricity | 0 | Active |
| US10451982B2 | Actuator assembly including magnetic sensor system for vibrationless position feedback | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.