Patent · US Active

Apparatus for illuminating and inspecting a surface

US7561263B2 · kind B2 · utility

0Cited by

4References

15Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Lambert Danner · Wetzlar, DE
Michael Heiden · Blieskastel, DE
Alexander Buettner · Weilburg, DE

Key dates

Filing date	Dec 22, 2006
Grant date	Jul 14, 2009
Priority date	—
Expiry date	Jul 28, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG02B3/005
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The present invention relates to an apparatus for illuminating and inspecting a specular surface, comprising a light source, a collector optics for collecting the light from the light source, a homogenizing optics for transmitting the light from the collector optics having a first micro-lens array downstream of the collector optics, and a second micro-lens array downstream of the first micro-lens array, a Fourier optics for transmitting the light from the homogenizing optics onto the specular surface, an objective optics, and a detector for receiving an image, wherein the collector optics and the first micro-lens array project the light source onto the second micro-lens array and wherein the second micro-lens array and the Fourier optics project the first micro-lens array onto the specular surface, and wherein the objective optics projects the specular surface onto the detector.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.