Patent · US Active

High-resolution, low-distortion and high-efficiency optical coupling in detection system of electron beam apparatus

US7566873B1 · kind B1 · utility

1Cited by

6References

21Claims

0Family size

Assignee

KLA-Tencor Technologies Corp. · US

Inventors

David J. Walker · Sunol, US
Salam Harb · Los Gatos, US
Vassil Spasov · San Jose, US
David G. Stites · St. Petersburg, US
Izzy Lewis · San Jose, US
Marian Mankos · Palo Alto, US

Key dates

Filing date	Dec 14, 2006
Grant date	Jul 28, 2009
Priority date	—
Expiry date	Mar 17, 2028

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/24592
WIPO fieldOptics
WIPO sectorInstruments

Abstract

One embodiment relates to an apparatus for inspecting a substrate using charged particles. The apparatus includes an illumination subsystem, an objective subsystem, a projection subsystem, and a beam separator interconnecting those subsystems. The apparatus further includes a detection system which includes a scintillating screen, a detector array, and an optical coupling apparatus positioned therebetween. The optical coupling apparatus includes both refractive and reflective elements. Other embodiments and features are also disclosed.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.