Controlling a fabrication tool using support vector machine
US7567352B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 13, 2008 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | May 13, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70491
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A fabrication tool can be controlled using a support vector machine. A profile model of the structure is obtained. The profile model is defined by profile parameters that characterize the geometric shape of the structure. A set of values for the profile parameters is obtained. A set of simulated diffraction signals is generated using the set of values for the profile parameters, each simulated diffraction signal characterizing the behavior of light diffracted from the structure. The support vector machine is trained using the set of simulated diffraction signals as inputs to the support vector machine and the set of values for the profile parameters as expected outputs of the support vector machine. After the support vector machine has been trained, a fabrication process is performed using the fabrication tool to fabricate the structure on the wafer. A measured diffraction signal off the structure is obtained. The measured diffraction signal is inputted into the trained support vector machine. Values of profile parameters of the structure are obtained as an output from the trained support vector machine. One or more process parameters or equipment settings of the fabrication tool a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.