Method and system for dynamically changing the transport sequencing in a cluster tool
US7567851B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 10, 2007 |
| Grant date | Jul 28, 2009 |
| Priority date | — |
| Expiry date | Jan 10, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY02P90/02
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
By dynamically adapting the transport sequencing rules of a cluster tool, the overall performance of the tool may be increased. In some illustrative embodiments, the transport sequencing rule for a robot handler may be dynamically changed when a lot of small size is present in one of the load ports in order to increase the window of opportunity for carrier exchange of a standard lot size currently processed. Consequently, by reducing the overall process time for the currently processed lot while delaying the completion of the small lot, the currently processed carrier may be exchanged earlier, thereby reducing the overall cycle time of the currently processed lot and/or providing a next lot earlier to the tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.