Methods and systems for generating an inspection process for an inspection system
US7570797B1 · kind B1 · utility
31Cited by
12References
20Claims
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Key dates
| Filing date | May 10, 2005 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Mar 9, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06V2201/06
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for generating an inspection process for an inspection system are provided. One computer implemented method includes generating inspection data for a selected defect on a specimen at different values of one or more image acquisition parameters of the inspection system. The method also includes determining which of the different values produces the best inspection data for the selected defect. In addition, the method includes selecting the different values determined to produce the best inspection data as values of the one or more image acquisition parameters to be used for the inspection process.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.