Patrick Huet
13Patents
6h-index
40Co-inventors
62Inventor score
Filing activity: Feb 7, 2003 → Apr 21, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6718526B1 | Spatial signature analysis | Physics | 64 | Expired |
| US7227628B1 | Wafer inspection systems and methods for analyzing inspection data | Physics | 33 | Expired |
| US7570797B1 | Methods and systems for generating an inspection process for an inspection system | Physics | 31 | Active |
| US7142992B1 | Flexible hybrid defect classification for semiconductor manufacturing | Physics | 16 | Expired |
| US7006886B1 | Detection of spatially repeating signatures | Electricity | 11 | Expired |
| US7417724B1 | Wafer inspection systems and methods for analyzing inspection data | Physics | 6 | Active |
| US7394534B1 | Process excursion detection | Physics | 6 | Expired |
| US8165837B1 | Multi-scale classification of defects | Physics | 5 | Active |
| US8537349B2 | Monitoring of time-varying defect classification performance | Emerging Cross-Sectional Technologies | 4 | Active |
| US7646476B2 | Process excursion detection | Physics | 2 | Active |
| US9037280B2 | Computer-implemented methods for performing one or more defect-related functions | Physics | 2 | Active |
| US8289510B2 | Process excursion detection | Physics | 0 | Active |
| US9489599B2 | Decision tree construction for automatic classification of defects on semiconductor wafers | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.