Methods and systems for binning defects detected on a specimen
US7570800B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 14, 2005 |
| Grant date | Aug 4, 2009 |
| Priority date | — |
| Expiry date | Feb 10, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2207/30148
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Methods and systems for binning defects detected on a specimen are provided. One method includes comparing a test image to reference images. The test image includes an image of one or more patterned features formed on the specimen proximate to a defect detected on the specimen. The reference images include images of one or more patterned features associated with different regions of interest within a device being formed on the specimen. If the one or more patterned features of the test image match the one or more patterned features of one of the reference images, the method includes assigning the defect to a bin corresponding to the region of interest associated with the reference image.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.