Method and system for controlling process tools by interrupting process jobs depending on job priority

US7571020B2 · kind B2 · utility

Assignee

• Advanced Micro Devices, Inc. · US

Inventor

• Kilian Schmidt · Dresden, DE

Key dates

• Filing date: Jan 3, 2007
• Grant date: Aug 4, 2009
• Expiry date: Sep 7, 2027

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

By enabling an interleaved mode when supplying substrates from a plurality of load ports to a respective process module, a reduction of non-productive time of the process tool and/or a reduction of cycle time may be achieved compared to a conventional sequential processing of carriers. Upon arrival at a load port of the process tool, an appropriate priority may be assigned to the carrier, wherein a higher priority may enable the interruption of the processing of a lower-ranked substrate carrier.