System for wide frequency dynamic nanomechanical analysis
US7584653B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2006 |
| Grant date | Sep 8, 2009 |
| Priority date | — |
| Expiry date | Aug 9, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2203/0286
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Dynamic nanomechanical analysis of a sample is performed by using a cantilever probe that interacts with the sample using a force applied across a wide range of frequencies that includes frequencies greater than 300 Hz. The motion of the cantilever probe is detected in response to the applied force over the range of frequencies and analyzed over at least a portion of the wide range of frequencies to determine a mechanical response of the sample, preferably including quality factor and modulus of the sample. The analysis of the motion of the cantilever probe is preferably performed in terms of amplitude, phase, and frequency of both the probe and the sample and preferably, where the applied force is analyzed to determine both a real and an imaginary modulus of a mechanical response of the sample. Preferably, the force is applied so as to produce a minimum of phase and amplitude response variation in the absence of the sample. Furthermore the motion of the cantilever can be flexural or torsional and combinations thereof.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.