Detachable electrostatic chuck having sealing assembly
US7589950B2 · kind B2 · utility
50Cited by
71References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 13, 2006 |
| Grant date | Sep 15, 2009 |
| Priority date | — |
| Expiry date | Dec 12, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T279/23
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A detachable electrostatic chuck is capable of being attached to a pedestal in a process chamber. The chuck comprises an electrostatic puck having a ceramic body with an embedded electrode. The chuck also has a baseplate below the electrostatic puck with a lower surface which is bonded to a sealing assembly comprising a sealing plate and sealing ring. The sealing plate and ring are polished to form a gas-tight seal between the chuck and pedestal to prevent gas leakage from or into this region.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.