Method and apparatus for obtaining quantitative measurements using a probe based instrument
US7596990B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 14, 2005 |
| Grant date | Oct 6, 2009 |
| Priority date | — |
| Expiry date | Apr 14, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q60/366
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A cantilever probe-based instrument is controlled to counteract the lateral loads imposed on the probe as a result of probe sample interaction. The probe preferably includes an active cantilever, such as a so-called bimorph cantilever. Force counteraction is preferably achieved by monitoring a lateral force-dependent property of probe operation such as cantilever free end deflection angle and applying a voltage to at least one of the cantilever and one or more separate actuators under feedback to maintain that property constant as the probe-sample spacing decreases. The probe could further uses at least one of contact flexural and torsional resonances characteristics to determine contact and release points. With the knowledge of the tip profile, quantitative mechanical data for probe sample interaction can be obtained.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.