Automatic optical inspection using multiple objectives
US7599075B2 · kind B2 · utility
2Cited by
6References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 8, 2008 |
| Grant date | Oct 6, 2009 |
| Priority date | — |
| Expiry date | Apr 8, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/8903
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Apparatus and techniques for automated optical inspection (AOI) utilizing image scanning modules with multiple objectives for each camera are provided. A scanning mechanism includes optical components to sequentially steer optical signals from each of the multiple objectives to the corresponding camera.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.