System for controlling the sublimation of reactants
US7601225B2 · kind B2 · utility
541Cited by
25References
25Claims
0Family size
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Key dates
| Filing date | Jun 16, 2003 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Oct 11, 2023 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45525
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
An apparatus and method improves heating of a solid precursor inside a sublimation vessel. In one embodiment, inert, thermally conductive elements are interspersed among units of solid precursor. For example the thermally conductive elements can comprise a powder, beads, rods, fibers, etc. In one arrangement, microwave energy can directly heat the thermally conductive elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.