Trench type buried on-chip precision programmable resistor
US7601602B2 · kind B2 · utility
2Cited by
14References
2Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 6, 2006 |
| Grant date | Oct 13, 2009 |
| Priority date | — |
| Expiry date | Dec 3, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10B20/25
Abstract
An on-chip, ultra-compact, and programmable semiconductor resistor device and device structure and a method of fabrication. Each semiconductor resistor device structure is formed of one or more conductively connected buried trench type resistor elements exhibiting a precise resistor value. At least two semiconductor resistor device structures may be connected in series or in parallel configuration through the intermediary of one or more fuse devices that may be blown to achieve a desired total resistance value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.