Patent · US Active

Optical device with raster elements, and illumination system with the optical device

US7605386B2 · kind B2 · utility

18Cited by

17References

19Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Wolfgang Singer · Aalen, DE
Johannes Wangler · Oberkochen, DE
Markus Deguenther · Aalen, DE
Birgit Kuerz · Aalen, DE
Christoph Menke · Oberkochen, DE

Key dates

Filing date	Nov 10, 2006
Grant date	Oct 20, 2009
Priority date	—
Expiry date	Oct 8, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG02B17/0657
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The invention relates to an optical device that includes (a) a first optical element with at least one first raster element, where the first raster element has a first axis, (b) a second optical element with at least one second raster element, where the second raster element has a second axis. The first raster element can be changed in its position relative to the second raster element, so that a distance between the first axis and the second axis is variable.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.