Semiconductor device with seal ring
US7605448B2 · kind B2 · utility
15Cited by
7References
35Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2005 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Oct 8, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device according to the invention is a semiconductor device which includes a low dielectric constant film of which the relative dielectric constant is less than 3.5, is provided with one or more seal rings that are moisture blocking walls in closed loop form in a plan view, and where at least one of the seal rings includes a seal ring protrusion portion in inward protruding form in the vicinity of a chip corner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.