Data processing equipment, inspection assistance system, and data processing method
US7606409B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 15, 2005 |
| Grant date | Oct 20, 2009 |
| Priority date | — |
| Expiry date | Dec 2, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG07C3/146
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
A data processing apparatus, which is connected to an inspection tool and an review tool via a network, automatically receives inspection result file regarding defect information from the inspection tool and image information from the review tool. Moreover, the data processing apparatus makes comparative check between the defect, image, and attribute information outputted from the inspection tool and the defect, image, and attribute information observed in the review tool. Finally, the data processing apparatus displays, on its window, both of the above-described information in a manner of being organized and arranged side by side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.