Tomohiro Funakoshi
15Patents
4h-index
22Co-inventors
52Inventor score
Filing activity: Nov 15, 2005 → Jan 17, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7884948B2 | Surface inspection tool and surface inspection method | Physics | 5 | Active |
| US8041443B2 | Surface defect data display and management system and a method of displaying and managing a surface defect data | Emerging Cross-Sectional Technologies | 4 | Active |
| US7606409B2 | Data processing equipment, inspection assistance system, and data processing method | Physics | 4 | Active |
| US8995748B2 | Defect image processing apparatus, defect image processing method, semiconductor defect classifying apparatus, and semiconductor defect classifying method | Electricity | 4 | Active |
| US9224575B2 | Charged particle beam device and overlay misalignment measurement method | Electricity | 3 | Active |
| US8625906B2 | Image classification standard update method, program, and image classification device | Electricity | 3 | Active |
| US8189205B2 | Surface inspection tool and surface inspection method | Physics | 2 | Active |
| US8472696B2 | Observation condition determination support device and observation condition determination support method | Physics | 2 | Active |
| US8209135B2 | Wafer inspection data handling and defect review tool | Physics | 2 | Active |
| US8290241B2 | Analyzing apparatus, program, defect inspection apparatus, defect review apparatus, analysis system, and analysis method | Physics | 2 | Active |
| US8653456B2 | Pattern inspection method, pattern inspection program, and electronic device inspection system | Electricity | 2 | Active |
| US7885789B2 | Recipe parameter management system and recipe parameter management method | Emerging Cross-Sectional Technologies | 2 | Active |
| US8358406B2 | Defect inspection method and defect inspection system | Electricity | 1 | Active |
| US10141159B2 | Sample observation device having a selectable acceleration voltage | Electricity | 0 | Active |
| US8462352B2 | Surface inspection tool and surface inspection method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.