Stabilizing a substrate using a vacuum preload air bearing chuck
US7607647B2 · kind B2 · utility
60Cited by
14References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2007 |
| Grant date | Oct 27, 2009 |
| Priority date | — |
| Expiry date | Jul 20, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6838
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Substrate processing method and apparatus are disclosed. The substrate processing apparatus includes a non-contact air bearing chuck with a vacuum preload.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.