Paul Doyle
8Patents
2h-index
16Co-inventors
44Inventor score
Filing activity: Mar 20, 2007 → May 24, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7607647B2 | Stabilizing a substrate using a vacuum preload air bearing chuck | Electricity | 60 | Active |
| US8817250B2 | Air bearing for substrate inspection device | Electricity | 3 | Active |
| US10451542B2 | Local purge within metrology and inspection systems | Electricity | 2 | Active |
| US8995066B2 | Passive position compensation of a spindle, stage, or component exposed to a heat load | Emerging Cross-Sectional Technologies | 1 | Active |
| US11280381B2 | Active damper for semiconductor metrology and inspection systems | Physics | 0 | Active |
| US9810619B2 | Method and system for simultaneous tilt and height control of a substrate surface in an inspection system | Physics | 0 | Active |
| US10784136B2 | FOUP purge shield | Electricity | 0 | Active |
| US8042254B1 | Method for improving edge handling chuck aerodynamics | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.