System for magnetic scanning and correction of an ion beam
US7615763B2 · kind B2 · utility
6Cited by
10References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 19, 2006 |
| Grant date | Nov 10, 2009 |
| Priority date | — |
| Expiry date | Jun 12, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/055
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A magnetic scanner employs constant magnetic fields to mitigate zero field effects. The scanner includes an upper pole piece and a lower pole piece that generate an oscillatory time varying magnetic field across a path of an ion beam and deflect the ion beam in a scan direction. A set of entrance magnets are positioned about an entrance of the scanner and generate a constant entrance magnetic field across the path of the ion beam. A set of exit magnets are positioned about an exit of the scanner and generate a constant exit magnetic field across the path of the ion beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.