Inventor · Lexington, MA, US

Edward C. Eisner

25Patents
5h-index
23Co-inventors
65Inventor score

Filing activity: Dec 6, 2005 → Dec 19, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US7399980B2 Systems and methods for beam angle adjustment in ion implanters Electricity 11 Active
US7227160B1 Systems and methods for beam angle adjustment in ion implanters Electricity 9 Active
US7615763B2 System for magnetic scanning and correction of an ion beam Electricity 6 Active
US8637838B2 System and method for ion implantation with improved productivity and uniformity Electricity 6 Active
US7589333B2 Methods for rapidly switching off an ion beam Electricity 5 Active
US8089052B2 Ion source with adjustable aperture Electricity 4 Active
US9679739B2 Combined electrostatic lens system for ion implantation Electricity 3 Active
US7566886B2 Throughput enhancement for scanned beam ion implanters Electricity 3 Active
US7550751B2 Ion beam scanning control methods and systems for ion implantation uniformity Electricity 3 Active
US10553392B1 Scan and corrector magnet designs for high throughput scanned beam ion implanter Electricity 2 Active
US7453074B2 Ion implanter with ionization chamber electrode design Electricity 2 Active
US8008636B2 Ion implantation with diminished scanning field effects Electricity 2 Active
US8168941B2 Ion beam angle calibration and emittance measurement system for ribbon beams Electricity 1 Active
US10037877B1 Ion implantation system having beam angle control in drift and deceleration modes Electricity 1 Active
US8963107B2 Beam line design to reduce energy contamination Electricity 1 Active
US11114270B2 Scanning magnet design with enhanced efficiency Electricity 1 Active
US8653486B2 Method and apparatus for improved uniformity control with dynamic beam shaping Electricity 1 Active
US10483086B2 Beam profiling speed enhancement for scanned beam implanters Electricity 1 Active
US8421039B2 Method and apparatus for improved uniformity control with dynamic beam shaping Electricity 1 Active
US9620327B2 Combined multipole magnet and dipole scanning magnet Electricity 0 Active
US11037754B2 Scan and corrector magnet designs for high throughput scanned beam ion implanter Electricity 0 Active
US10573485B1 Tetrode extraction apparatus for ion source Electricity 0 Active
US7858955B2 System and method of controlling broad beam uniformity Electricity 0 Active
US8803110B2 Methods for beam current modulation by ion source parameter modulation Electricity 0 Active
US8378313B2 Uniformity of a scanned ion beam Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.