Apparatus and method for probing integrated circuits using laser illumination

US7616312B2 · kind B2 · utility

Assignee

• DCG Systems, Inc. · US

Inventors

• Steven Kasapi · San Francisco, US
• Kenneth Wilsher · Palo Alto, US
• Gary Woods · Sunnyvale, US
• William Lo · Cupertino, US
• Radu Ispasoiu · Saratoga, US
• Nagamani Nataraj · Cupertino, US
• Nina Boiadjieva · Belmont, US

Key dates

• Filing date: Jun 29, 2005
• Grant date: Nov 10, 2009
• Expiry date: Jul 10, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/311
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus and method for laser probing of a DUT at very high temporal resolution is disclosed. The system includes a CW laser source, a beam optics designed to point two orthogonally polarized beams at the same location on the DUT, optical detectors for detecting the reflected beams, collection electronics, and an oscilloscope. The beam optics defines a common-path polarization differential probing (PDP) optics. The common-path PDP optics divides the laser beam into two beams of orthogonal polarization. Due to the intrinsic asymmetry of a CMOS transistor, the interaction of the beams with the DUT result in different phase modulation in each beam. This difference can be investigated to study the response of the DUT to the stimulus signal.