Spectroscopic ellipsometer and polarimeter systems

US7616319B1 · kind B1 · utility

Assignee

• James D. Welch · US

Inventors

• John A. Woollam · Lincoln, US
• Blaine D. Johs · Lincoln, US
• Craig M. Herzinger · Lincoln, US
• Ping He · Lincoln, US
• Martin M. Liphardt · Lincoln, US
• Galen L. Pfeiffer · Lincoln, US

Key dates

• Filing date: Aug 5, 2007
• Grant date: Nov 10, 2009
• Expiry date: Feb 29, 2028

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N2021/213
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.