Patent · US Expired

Method and device for producing extreme ultraviolet radiation or soft X-ray radiation

US7619232B2 · kind B2 · utility

16Cited by

4References

29Claims

0Family size

Assignees

XTREME technologies GmbH · DE
COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIES ALTERNATIVES · FR
AIXUV GmbH · DE

Inventors

Martin Schmidt · Brookline, US
Rainer Lebert · Kelmis, BE
Uwe Stamm · Göttingen, DE

Key dates

Filing date	Jun 27, 2003
Grant date	Nov 17, 2009
Priority date	—
Expiry date	Jun 5, 2025

Classification

Technology area (CPC H)Electricity
CPC primaryH05G2/0027
WIPO fieldMedical technology
WIPO sectorInstruments

Abstract

A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106 W/cm2 onto a target to produce a plasma; and said electrodes located around the path of the plasma produced by the laser source; and said electrodes being combined with components for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.