Patent · US Active

Sample orientation system and method

US7619752B2 · kind B2 · utility

2Cited by
20References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 30, 2007
Grant dateNov 17, 2009
Priority date—
Expiry dateFeb 29, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2201/02
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.