Patent · US Active

Method of producing a probe with a trapezoidal contactor

US7621045B2 · kind B2 · utility

3Cited by

18References

1Claims

0Family size

Assignee

TOKYO ELECTRON LIMITED · JP

Inventors

Hisatomi Hosaka · Nirasaki, JP
Kiyoshi Takekoshi · Nirasaki, JP

Key dates

Filing date	Feb 5, 2007
Grant date	Nov 24, 2009
Priority date	—
Expiry date	Aug 22, 2027

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10T29/49222
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A probe is disclosed, comprising a beam 4B, which has a front end 4b1, an intermediate portion 4b2 and a base end 4b3, the front end being a portion for contacting a test subject through a contactor, the base end being a portion for fixing the probe; and a substantially trapezoidal contactor 4A, which is fixed to the leading end 4b1 of the beam.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.