Gas delivery method and system including a flow ratio controller using antisymmetric optimal control
US7621290B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 21, 2005 |
| Grant date | Nov 24, 2009 |
| Priority date | — |
| Expiry date | Jul 18, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7761
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
The antisymmetric optimal control algorithm is disclosed for a gas delivery system including a flow ratio controller for dividing a single mass flow into at least two flow lines. Each flow line includes a flow meter and a valve. Both valves of the flow ratio controller are controlled through a ratio feedback loop by the antisymmetric optimal controller which includes a single input single output SISO controller, an inverter and two linear saturators. The output of the SISO controller is split and modified before being applied to the two valves. The two valve control commands are virtually antisymmetric to the maximum allowable valve conductance position. Due to the fact that these two valve commands are passing through respective linear saturators with the maximum allowable valve conductance position as one of the two saturation limits, the net effect is that one valve is kept at the maximum allowable valve conduction position at any moment of time while the other is actively controlled to maintain the flow ratio.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.