MEMS device and method of reducing stiction in a MEMS device
US7628072B2 · kind B2 · utility
6Cited by
18References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 19, 2006 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Jan 30, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0814
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.