Control of carbon nanotube diameter using CVD or PECVD growth
US7628974B2 · kind B2 · utility
13Cited by
3References
15Claims
0Family size
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Inventors
Key dates
| Filing date | Oct 22, 2003 |
| Grant date | Dec 8, 2009 |
| Priority date | — |
| Expiry date | Jul 17, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/843
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The diameter of carbon nanotubes grown by chemical vapor deposition is controlled independent of the catalyst size by controlling the residence time of reactive gases in the reactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.