System and method of measuring probe float
US7633306B2 · kind B2 · utility
1Cited by
7References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 15, 2004 |
| Grant date | Dec 15, 2009 |
| Priority date | — |
| Expiry date | Aug 21, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/07342
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A system and method allow accurate calculation of probe float through optical free-hanging and electrical planarity measurement techniques. In accordance with an examplary embodiment, probe float may be determined by acquiring a free-hanging planarity measurement, obtaining a first electrical contact planarity measurement, and calculating probe float using results of the acquiring and the obtaining operations.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.