Sputtering target, thin film for optical information recording medium and process for producing the same
US7635440B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 3, 2004 |
| Grant date | Dec 22, 2009 |
| Priority date | — |
| Expiry date | Jun 2, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/12
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
Provided is a sputtering target having a relative density of 80% or more and containing a compound having as its principal component zinc oxide satisfying AXBYO(KaX+KbY)/2(ZnO)m, 1<m, X≦m, 0<Y≦0.9, X+Y=2, where A and B are respectively different positive elements of trivalence or more, and the valencies thereof are respectively Ka and Kb. Obtained is a ZnO based sputtering target which does not contain ZnS and SiO2, and, upon forming a film via sputtering, is capable of reducing the affect of heating the substrate, of performing high speed deposition, of adjusting the film thickness to be thin, of reducing the generation of particles (dust) and nodules during sputtering, of improving the productivity with small variation in quality, and which has fine crystal grains and a high density of 80% or more, particularly 90% or more.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.