Composite metal films and carbon nanotube fabrication
US7635503B2 · kind B2 · utility
13Cited by
0References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 21, 2006 |
| Grant date | Dec 22, 2009 |
| Priority date | — |
| Expiry date | Oct 8, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/742
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Embodiments of the present invention provide methods for the fabrication of carbon nanotubes using composite metal films. A composite metal film is fabricated to provide uniform catalytic sites to facilitate the uniform growth of carbon nanotubes. Further embodiments provide embedded nanoparticles for carbon nanotube fabrication. Embodiments of the invention are capable of maintaining the integrity of the catalytic sites at temperatures used in carbon nanotube fabrication processes, 600 to 1100° C.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.