Apparatus and method for testing defects
US7639350B2 · kind B2 · utility
20Cited by
32References
20Claims
0Family size
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Key dates
| Filing date | Mar 5, 2007 |
| Grant date | Dec 29, 2009 |
| Priority date | — |
| Expiry date | Mar 5, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for detecting defects on a specimen includes mounting a specimen on a table with which is movable, obliquely projecting a laser as a line onto a surface of the specimen, detecting with an image sensor an image of light formed by light reflected from the specimen and passed through a filter which blocks scattered light resulting from repetitive patterns formed on the specimen, processing a signal outputted from the image sensor to extract defects of the specimen, and a displaying information of defects extracted by the signal processor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.