Shunichi Matsumoto
77Patents
13h-index
92Co-inventors
87Inventor score
Filing activity: Feb 11, 1981 → Mar 22, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6411377B1 | Optical apparatus for defect and particle size inspection | Electricity | 92 | Expired |
| US6627377B1 | Positive photosensitive poliymide composition | Emerging Cross-Sectional Technologies | 87 | Expired |
| US5539514A | Foreign particle inspection apparatus and method with front and back illumination | Physics | 81 | Expired |
| US6841321B2 | Method and system for processing a semi-conductor device | Physics | 62 | Expired |
| US6084664A | Method of and apparatus for inspecting reticle for defects | Physics | 42 | Expired |
| US7940383B2 | Method of detecting defects on an object | Electricity | 38 | Active |
| US6064477A | Method of and apparatus for inspecting reticle for defects | Physics | 37 | Expired |
| US7648815B2 | Negative photosensitive polyimide composition and method for forming image the same | Emerging Cross-Sectional Technologies | 36 | Expired |
| US7037735B2 | Apparatus and method for testing defects | Electricity | 24 | Expired |
| US6909930B2 | Method and system for monitoring a semiconductor device manufacturing process | Electricity | 24 | Expired |
| US7098055B2 | Apparatus and method for testing defects | Electricity | 21 | Expired |
| US7639350B2 | Apparatus and method for testing defects | Electricity | 20 | Active |
| US8045146B2 | Method and apparatus for reviewing defect | Physics | 15 | Active |
| US4460794A | Process for continuous production of alkylbenzaldehydes | Chemistry; Metallurgy | 12 | Expired |
| US7692732B2 | Display device with waterproof sheet and water absorbing member | Physics | 11 | Active |
| US7443496B2 | Apparatus and method for testing defects | Electricity | 11 | Active |
| US6686107B2 | Method for producing a semiconductor device | Physics | 10 | Expired |
| US9436990B2 | Defect observation method and device therefor | Physics | 9 | Active |
| US7692779B2 | Apparatus and method for testing defects | Electricity | 8 | Expired |
| US6777159B1 | Method for forming polyimide pattern using photosensitive polyimide and composition for use therein | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7084990B2 | Method and its apparatus for measuring size and shape of fine patterns | Physics | 7 | Expired |
| US6697698B2 | Overlay inspection apparatus for semiconductor substrate and method thereof | Physics | 7 | Expired |
| US6890626B1 | Imide-benzoxazole polycondensate and process for producing the same | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6801827B2 | Overlay inspection apparatus for semiconductor substrate and method thereof | Physics | 4 | Expired |
| US5705459A | Process for the production of polyol ester and ester-containing lubricating oil | Chemistry; Metallurgy | 4 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.