Techniques for providing ion source feed materials
US7655932B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 2007 |
| Grant date | Feb 2, 2010 |
| Priority date | — |
| Expiry date | Jun 3, 2028 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Techniques for providing ion source feed materials are disclosed. In one particular exemplary embodiment, the techniques may be realized as a container for supplying an ion source feed material. The container may comprise an internal cavity to be pre-filled with an ion source feed material. The container may also comprise an outer body configured to be removably loaded into a corresponding housing that is coupled to an ion source chamber via a nozzle assembly. The container may further comprise an outlet to seal in the pre-filled ion source feed material, the outlet being further configured to engage with the nozzle assembly to establish a flow path between the internal cavity and the ion source chamber. The container may be configured to be a disposable component.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.