Inventor · Seabrook, NH, US

Christopher R. Hatem

35Patents
5h-index
41Co-inventors
65Inventor score

Filing activity: Apr 10, 2007 → Jun 14, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9589802B1 Damage free enhancement of dopant diffusion into a substrate Electricity 23 Active
US8460569B2 Method and system for post-etch treatment of patterned substrate features Electricity 11 Active
US7655932B2 Techniques for providing ion source feed materials Electricity 8 Active
US10879055B2 Techniques, system and apparatus for selective deposition of a layer using angled ions Electricity 8 Active
US9985101B2 Encapsulated nanostructures and method for fabricating Performing Operations; Transporting 5 Active
US7642150B2 Techniques for forming shallow junctions Electricity 5 Active
US9337040B1 Angled ion beam processing of heterogeneous structure Electricity 5 Active
US8461032B2 Use of dopants with different diffusivities for solar cell manufacture Emerging Cross-Sectional Technologies 2 Active
US8465909B2 Self-aligned masking for solar cell manufacture Emerging Cross-Sectional Technologies 2 Active
US8124506B2 USJ techniques with helium-treated substrates Electricity 2 Active
US7807961B2 Techniques for ion implantation of molecular ions Electricity 2 Active
US11069511B2 System and methods using an inline surface engineering source Electricity 2 Active
US7622722B2 Ion implantation device with a dual pumping mode and method thereof Electricity 1 Active
US8003957B2 Ethane implantation with a dilution gas Electricity 1 Active
US9953835B2 Damage free enhancement of dopant diffusion into a substrate Electricity 1 Active
US8012843B2 Optimized halo or pocket cold implants Electricity 1 Active
US8372735B2 USJ techniques with helium-treated substrates Electricity 1 Active
US9520360B2 Angled ion beam processing of heterogeneous structure Electricity 1 Active
US9240350B2 Techniques for forming 3D structures Electricity 1 Active
US10411096B2 Encapsulated nanostructures and devices containing encapsulated nanostructures Performing Operations; Transporting 1 Active
US10541137B2 Method and apparatus for non line-of-sight doping Electricity 0 Active
US9425027B2 Methods of affecting material properties and applications therefor Electricity 0 Active
US11862433B2 System and methods using an inline surface engineering source Electricity 0 Active
US8742373B2 Method of ionization Electricity 0 Active
US9553174B2 Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.