Patent · US Active

System for testing semiconductors

US7656172B2 · kind B2 · utility

11Cited by
1,177References
12Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJan 18, 2006
Grant dateFeb 2, 2010
Priority date
Expiry dateMar 1, 2028

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01R31/2891
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A semiconductor testing system that includes an plural imaging devices for capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.