System for testing semiconductors
US7656172B2 · kind B2 · utility
11Cited by
1,177References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 18, 2006 |
| Grant date | Feb 2, 2010 |
| Priority date | — |
| Expiry date | Mar 1, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2891
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A semiconductor testing system that includes an plural imaging devices for capturing plural video sequences from a single optical path and concurrently displaying the video sequences for effectively positioning a probe for testing a semiconductor wafer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.