Method and apparatus of high speed property mapping
US7658097B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 29, 2006 |
| Grant date | Feb 9, 2010 |
| Priority date | — |
| Expiry date | Sep 29, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01Q10/04
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A probe instrument having a probe that interacts with a sample surface to perform a mechanical property measurement at high speed includes a scanner producing relative motion between the sample and the probe. In addition, a probe actuator produces relative motion between the sample and the probe, in a generally vertical direction, and a controller that generates a scanner drive signal and an actuator drive signal. The probe actuator is responsive to the actuator drive signal and has an operable bandwidth of at least about 50-80 kHz to perform the fast force curve measurements. The probe actuator is preferably located at least partially on the cantilever. Moreover, feedback during normal operation may be interrupted to perform a force curve measurement with the integrated actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.